High-frequency circuit element having a superconductive resonator with an electroconductive film about the periphery

Abstract

In a small transmission line type high-frequency circuit element that has small loss due to conductor resistance and has a high Q value, an error in the dimension of a pattern, etc. can be corrected to adjust element characteristics. An elliptical shape resonator ( ) that is formed of an electric conductor is formed on a substrate ( ), while a pair of input-output terminals ( ) are formed on a substrate ( ). Substrate ( ) on which resonator ( ) is formed and substrate ( ) on which input-output terminal ( ) is formed are located parallel to each other, with a surface on which resonator ( ) is formed and a surface on which input-output terminal ( ) is formed being opposed. Substrates ( ) and ( ) that are located parallel to each other are relatively moved by a mechanical mechanism that uses a screw and moves slightly. Also, substrate ( ) is rotated by the mechanical mechanism that uses a screw and moves slightly around the center axis of resonator ( ) as a rotation axis ( ).