The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2002

Filed:

Nov. 26, 1997
Applicant:
Inventor:

Timothy N. Chang, Pompton Plains, NJ (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 4/108 ;
U.S. Cl.
CPC ...
H01L 4/108 ;
Abstract

A piezoelectric actuator that is capable of providing up to six degrees of positioning freedom. Specifically, the piezoelectric actuator is capable of providing positioning freedom in three linear directions (x, y, z) and three rotary angles (&phgr;, &thgr;, &psgr;). The piezoelectric actuator typically comprises a plurality of unit cells stacked on top of one another. Each unit cell comprises a base plate, a cruciform base, and a stack of piezoelectric plates. The base plate is used to support the cruciform base. The cruciform base comprises a piezoelectric cruciform-shaped body, a plurality of electrodes formed on the top surface of the cruciform-shaped body, and a ground plane formed on the bottom surface of the cruciform-shaped body. Each piezoelectric plate in the stack of piezoelectric plates comprises a piezoelectric plate body, a plurality of electrodes formed on the top surface of the plate body, and a ground plane formed on the bottom surface of the plate body. The piezoelectric plates are bonded together and to the cruciform base. Motion (linear or angular) is generated by applying suitable drive voltages to the electrodes.


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