Semiconductor storage unit and method of manufacturing the same

Abstract

A semiconductor storage unit and a method of manufacturing the same are provided. In the semiconductor storage unit, the formation of a gate electrode within a semiconductor substrate decreases the occurrence of a short circuit between conductive layers, provides an excellent electric connection in a connection hole between the semiconductor substrate and a conductive layers, and also reduces the number of manufacturing processes. In a semiconductor substrate, unit memory cells and are formed by providing a gate electrode in a region where a second opening is formed in a first opening, a first impurity-diffusion layer, a second impurity-diffusion layer, a third impurity-diffusion layer, a bit line, a charge-storage electrode, a capacity insulating film, and a plate electrode. Regions where the second opening is not formed are isolation regions and between memory cells. Consequently, a short circuit between the gate electrode and the other conductive layers does not occur easily and connection holes and can be made shallower, thus obtaining an excellent electric connection inside the connection holes.