The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 19, 2002

Filed:

Oct. 16, 2000
Applicant:
Inventors:

Hisashi Ohsaki, Yokohama, JP;

Yuko Tachibana, Yokohama, JP;

Takuji Oyama, Yokohama, JP;

Hiromichi Nishimura, Yokohama, JP;

Yoshihito Katayama, Funabashi, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B32B 7/02 ; C03C 1/723 ;
U.S. Cl.
CPC ...
B32B 7/02 ; C03C 1/723 ;
Abstract

A light absorptive antireflector provided with a titanium oxy-nitride film having a geometrical film thickness of from 5 to 25 nm, wherein O/Ti (atomic ratio)=0.11 to 0.33, and a film composed mainly of silica and having a geometrical film thickness of from 70 to 130 nm, and a process for its production.


Find Patent Forward Citations

Loading…