The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 19, 2002
Filed:
Sep. 29, 2000
Applicant:
Inventor:
Larry S. Wingo, Rhome, TX (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
A47F 7/00 ; B05C 1/302 ;
U.S. Cl.
CPC ...
A47F 7/00 ; B05C 1/302 ;
Abstract
A rail for use as a support in an apparatus for holding semiconductor wafers during heat treatment of the wafers in a furnace comprises a plurality of teeth arranged such that the space between adjacent teeth can receive a portion of a semiconductor wafer. The teeth contain a raised support structure, such as a ledge, located on their top surface for supporting a wafer. Each tooth usually has a length greater than about 20 millimeters, and the raised support structure typically occupies greater than about 50% of the length of a tooth.