The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2002
Filed:
Oct. 03, 2000
Richard L. Freeman, Del Mar, CA (US);
Robert L. Miller, San Diego, CA (US);
Archimedes Technology Group, Inc., San Diego, CA (US);
Abstract
A device for generating a plasma includes an enclosed chamber and an antenna positioned adjacent the wall of the chamber. A ceramic shield is mounted on the wall, with the antenna located between the wall and the ceramic shield. There is also a barrier that is mounted on the wall with the ceramic shield being between the barrier and the antenna element. An alternating voltage source is provided to energize the antenna element to generate a plasma in the chamber. In operation, the ceramic shield isolates the antenna from the plasma in the chamber, and the barrier prevents the deposition of material components from the plasma on the ceramic shield.