The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 12, 2002
Filed:
Oct. 18, 1999
Jean-Pierre Briand, Antony, FR;
Universite Pierre et Marie Curie, Paris Cedex, FR;
Abstract
The invention concerns a method for treating a surface ( ) of a semiconductor ( B) and a corresponding treating device. The surface is made by first molecules of the semiconductor having external bonds saturated with hydrogen. The method consists in sending a beam ( )of ions highly charged and with low energy towards the surface, and applying thereto a deceleration voltage U in the proximity of the surface. In this way, the ions extract without making contact the electrons of the first molecules, releasing the hydrogen atoms saturating the corresponding external bonds. Then a product saturating the pendant external bonds is sent so as to form second molecules of an insulating compound. The invention is useful for surface cleaning, etching and nano-manufacturing.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile