The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 12, 2002

Filed:

Dec. 09, 1999
Applicant:
Inventors:

Didier Pierrejean, Villaz, FR;

Frédéric Rouveyre, Chavanod, FR;

Bertrand Seigeot, Dingy Saint Clair, FR;

Assignee:

Alcatel, Paris, FR;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01M 3/20 ;
U.S. Cl.
CPC ...
G01M 3/20 ;
Abstract

In a system in accordance with the invention for detecting leaks, a mass spectrometer is connected to the aspiration side of a secondary pump whose discharge side is connected to the aspiration side of a primary pump driven by a rotational drive system adapted to vary the rotation speed of the primary pump between at least two different rotation speeds. An aspiration inlet is selectively connected by control valves either to the aspiration side of the primary pump or to the aspiration side or an intermediate area of the secondary pump. Variation of the rotation speed of the primary pump is used to perform faster pre-evacuation before the test, to detect grosser leaks, to compensate for a high level of outgassing or to adapt the sensitivity of the device, and equally to eliminate helium background noise from the primary pump.


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