The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2002
Filed:
Nov. 09, 1999
Shigeaki Noumi, Kumamoto, JP;
Kouji Yabushita, Kumamoto, JP;
Kabushiki Kaisha Advanced Display, Kumamoto, JP;
Abstract
A manufacturing method of a liquid crystal display is provided. The liquid crystal display having a picture element electrode formed on the uppermost layer of a structure is capable of reducing connection resistance between picture element electrode and drain electrode through interlayer insulating film. At the time of forming the picture element electrode, ITO film can be patterned into a desirable pattern without short circuit between assembled terminals in one etching process. In the process of forming a contact hole for connecting the picture element electrode and the drain electrode on the interlayer insulating film and on the passivation film , a dry etching condition is established so that after the ashing process using O gas to remove residue on the bottom of the contact hole , an etching process using fluorine gas +O gas etc. is performed to reduce irregularity on the surface of the interlayer insulating film