The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2002
Filed:
Dec. 08, 1999
Applicant:
Inventors:
Charles D. Schaper, Union City, CA (US);
Khalid El-Awady, Mtn. View, CA (US);
Thomas Kailath, Stanford, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H05B 3/68 ; C23C 1/600 ;
U.S. Cl.
CPC ...
H05B 3/68 ; C23C 1/600 ;
Abstract
A module for thermally processing a substrate has a plurality of thermally-conductive heating elements supported in position within a plane. Resistive heaters in the form of cartridge heaters are in thermal contact with the heating elements. Multiple zones are enabled by physical separation of the heating elements that constitute the thermal processing plate. A cooling plate is positioned in proximity to the backside of the heating elements and can be driven into thermal contact with the upper heated plate when cooing is desired.