The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2002
Filed:
Jan. 05, 1999
Applicant:
Inventor:
Mitsuru Nishitsuji, Osaka, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/18242 ; H01L 2/120 ;
U.S. Cl.
CPC ...
H01L 2/18242 ; H01L 2/120 ;
Abstract
A method for fabricating a capacitor according to the present invention includes the steps of: forming a lower-level electrode layer over a structure having thermally deteriorative properties; depositing an insulating film, containing a titanium oxide, on the lower-level electrode layer at a deposition temperature of 400° C. or less; conducting a heat treatment at a temperature higher than the deposition temperature and lower than 500° C. after the insulating film has been deposited; and depositing an upper-level electrode layer on the insulating film after the heat treatment has been conducted.