The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 05, 2002
Filed:
May. 24, 1999
Andrew C. McNeil, Scottsdale, AZ (US);
David J. Monk, Mesa, AZ (US);
Bishnu P. Gogoi, Scottsdale, AZ (US);
Motorola Inc., Schaumburg, IL (US);
Abstract
A method of manufacturing a sensor includes forming a first electrode ( ), forming a sacrificial layer ( ) over the first electrode, and forming a layer ( ) over the sacrificial layer where a second electrode ( ) is located in the layer. The method further includes removing the sacrificial layer after forming the layer to form a cavity ( ) between the first and second electrodes and then sealing the cavity between the first and second electrodes. The layer is supported over the first electrode by a post ( ) in the cavity, and the second electrode is movable relative to the first electrode and is movable in response to a pressure external to the cavity.