The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2002
Filed:
Jul. 21, 2000
Shmuel Kaldor, Haifa, IL;
Yael Nemirovsky, Haifa, IL;
Ehud Netzer, Timrat, IL;
Dan Seter, Haifa, IL;
Ofir Degani, Ashkelon, IL;
Eran Socher, Tel-Aviv, IL;
Other;
Abstract
A micro-electromechanical optical inertial sensing device comprises a CMOS chip ( ), comprising at least one integrated photodiode ( ) and analog electronics; an elastically suspended proof mass ( ); and a light source ( ). A light beam from the light source casts a partial shadow of the proof mass over the photodiode when the proof mass is at rest. When subjected to an inertial movement, the proof mass swings causing the partial shadow to shift and modulate the illumination of the photodiode. An output current signal from the photodiode is processed by the analog electronics to generate measurement results.