The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2002
Filed:
Aug. 12, 1999
Applicant:
Inventors:
David L. Larkin, Richardson, TX (US);
George E. Harris, Garland, TX (US);
William D. Smith, Garland, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/14763 ;
U.S. Cl.
CPC ...
H01L 2/14763 ;
Abstract
A method for decreasing CHC degradation is provided. The method includes providing a semiconductor device ( ) having at least one metal layer ( ) completed. Then, a planarizing dielectric layer ( ) is added to the semiconductor device ( ). The semiconductor device ( ) is heated in a hydrogen rich environment until hydrogen completely saturates the semiconductor device ( ).