The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2002
Filed:
May. 26, 2000
STMicroelectronics S.r.l., Agrate Brianza, IT;
Abstract
A method for autoaligning lines of a conductive material in circuits integrated on a semiconductor substrate is presented. The method includes forming several regions projecting from the substrate surface and aligned to one another, and forming a fill layer in the gaps between the projecting regions. The fill layer is planarized to expose the regions, and a portion of the regions is removed to form holes at the locations of the regions. Next an insulating layer is formed in the holes. The insulating layer is selectively removed to form spacers along the edges of said holes and at least one conductive layer is deposited over the exposed surface. Later, a step of photolithograpy with a mask is performed and the conductive layer is etched to define lines and collimate them to the underlying regions.