The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 26, 2002
Filed:
Apr. 27, 1998
James J. Sun, New Brighton, MN (US);
Benjamin Y. H. Liu, North Oaks, MN (US);
Virgil A. Marple, Maple Plain, MN (US);
MSP Corporation, Minneapolis, MN (US);
Abstract
A thin film deposition apparatus is used for applying thin films onto substrates, such as large panel displays, as well as integrated circuit devices, and includes a source of an ionized gas that is intermixed with an aerosol prior to deposition. The ionized gas causes the aerosol particles to take on an electrical charge. The aerosol containing the charged particles is concentrated in a virtual impactor and then provided to a shower head or orifice that is used for depositing the aerosol material onto the substrate. The shower head can be moved in a selected pattern to uniformly deposit aerosol particles as a thin film on the substrate.