The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2002
Filed:
Aug. 24, 1999
Applicant:
Inventors:
Yukihisa Takeuchi, Aichi-prefecture, JP;
Tsutomu Nanataki, Toyoake, JP;
Katsuyuki Takeuchi, Aichi-prefecture, JP;
Assignee:
NGK Insulators, Ltd., Nagoya, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 3/126 ; H01L 4/109 ;
U.S. Cl.
CPC ...
B32B 3/126 ; H01L 4/109 ;
Abstract
A method for forming a ceramic diaphragm structure includes providing a laminate of a ceramic green substrate having at least one window and a plurality of layers, and a thin ceramic green sheet superimposed on the ceramic green substrate to cover the at least one window. The laminate is fired so that the ceramic green sheet provides a diaphragm portion protruding in a direction away from the at least one window, and the fired laminate is subjected to a second firing step under load.