The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2002
Filed:
Feb. 09, 2000
Applicant:
Inventors:
Gary M. Moore, Los Gatos, CA (US);
Katsuhito Nishikawa, San Jose, CA (US);
Assignee:
Moore Epitaxial, Inc., Tracy, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05B 1/700 ;
U.S. Cl.
CPC ...
B05B 1/700 ;
Abstract
A gas jet assembly includes a gas injector having a longitudinal axis, a first motor coupled to the gas injector and a second motor coupled to the gas injector. The first motor controls a position of the gas injector along the longitudinal axis of the gas injector. The second motor controls the angular position of the gas injector around the longitudinal axis of the gas injector.
Moore, Gary. (2002). Semiconductor processing reactor controllable gas jet assembly (U.S. Patent No. 6347749). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6347749
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile