The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 19, 2002
Filed:
Dec. 16, 1999
Ulrich Kaczynski, Bad Nauheim, DE;
Abstract
A displaceable X/Y coordinate measurement table having two orthogonally arranged measurement mirrors for interferometric position determination is described. The displaceable measurement table, a mirror body carrying the measurement mirrors, and the receptacle for the substrate are embodied as separate components. The mirror body has a number of support points on its upper side and lower side for supporting a substrate or a receptacle above the upper side and for supporting the mirror body on the lower points above the measurement table. The mirror geometry is therefore unaffected by the weight of various substrates. The two measurement mirrors are integrated into a one-piece mirror body made of a material having an extremely low coefficient of thermal expansion. The described embodiments have frame-shaped openings in the X/Y coordinate measurement table and mirror body, which makes the measurement table suitable for both reflected and transmitted applications.