The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2002
Filed:
Aug. 03, 2000
Applicant:
Inventors:
Tomohiro Okumura, Osaka-fu, JP;
Takuya Matsui, Osaka-fu, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01Q 1/26 ; C23C 1/600 ;
U.S. Cl.
CPC ...
H01Q 1/26 ; C23C 1/600 ;
Abstract
A substrate is processed while plasma distribution on the substrate is controlled by a plasma trap made up of a groove-shaped space between a dielectric plate and a dielectric ring provided around the dielectric plate, and a groove-shaped space between an antenna and a conductor ring provided around the antenna.