The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2002
Filed:
Jan. 27, 1995
Applicant:
Inventor:
Thomas J. Hughes, Macungie, PA (US);
Assignee:
Gentex Optics, Inc., Carbondale, PA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 1/434 ;
U.S. Cl.
CPC ...
C23C 1/434 ;
Abstract
A method of building up an oxidized metal coating on a substrate in which the substrate is positioned adjacent a metal target in a chamber containing a low pressure mixture of inert and reactive gases; and a voltage having AC and DC components is applied to the target to sputter onto the substrate a thin layer of elemental metal and oxidized metal. The substrate is then moved to an oxidizing station in the chamber and the layer is subjected to reactive ions, as for example a beam of reactive ions, which oxidizes the elemental metal in the layer. The steps are repeated until an oxidized metal coating of a desired thickness has been built up.