The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 12, 2002
Filed:
May. 12, 1999
Applicant:
Inventors:
Assignee:
Siemens Elema AB, Solna, SE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01F 1/74 ;
U.S. Cl.
CPC ...
G01F 1/74 ;
Abstract
A fluid flow meter has a semi-conducting substrate and a number of integral flexible tines orientated across an aperture in the substrate to deflect in the direction of the fluid flow by an amount dependent on that fluid flow. Piezo-resistive regions are included on the respective tines to provide them with electrical characteristics which vary dependent on the degree of deflection. A monitor, operably coupled to the regions of the tines, is provided to monitor the changes in their electrical characteristics and to calculate the flow therefrom.