The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2002
Filed:
Nov. 23, 1999
Applicant:
Inventors:
Robert W. Eason, Southampton, GB;
Graeme W. Ross, Aberdeen, GB;
Peter G. R. Smith, Romsey, GB;
Ian E. Barry, Sindlesham, GB;
Assignee:
Qinetiq Limited, Farnborough, GB;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C 1/22 ; H01L 2/100 ;
U.S. Cl.
CPC ...
B44C 1/22 ; H01L 2/100 ;
Abstract
A method of etching structural depressions in a substrate comprises aligning the ferroelectric domains within the substrate to domain orientations selected from two or more possible domain orientations, whereby the rate at which substrate material is etched by an etchant varies with the domain orientation of the substrate material; and exposing the substrate to the etchant.