The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 05, 2002
Filed:
Aug. 26, 1999
Masatoshi Enomoto, Tochigi, JP;
Seiji Tasaki, Tochigi, JP;
Naoyuki Kawata, Tochigi, JP;
Takenori Hashimoto, Tochigi, JP;
Showa Denko K.K., Tokyo, JP;
Abstract
A backing plate for sputtering is constituted by a base portion comprising a plate member made of aluminum or its alloy, a surface of which is attached with a target T of an ITO sintered body or the like and a cooling portion in a flat plate shape having a cooling medium flow path at an inner portion thereof. Further, the cooling portion is integrally attached to a rear face of the base by friction agitation bonding. The cooling portion comprises a roll bond panel made of aluminum or its alloy and inner hollow portions of bulged pipe portions constitute the cooling medium flow path . Thereby, a backing plate which is light-weighted and has high cooling efficiency can be provided.