The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 29, 2002
Filed:
Nov. 23, 1999
Yosuke Jinbo, Tokyo, JP;
Satoru Amano, Tokyo, JP;
Hoya-Schott Corporation, Tokyo, JP;
Abstract
An ultraviolet ray irradiation apparatus has a turntable which mounts a substance to be processed, a driving source which rotates and drives the turntable, a filter which adjusts light quantity of an ultraviolet light beam that reaches a surface to be processed of a substance W to be processed in accordance with shapes of an ultraviolet beam passing region. In the filter, the shape of the ultraviolet light beam passing region is symmetrical for a center line for a length direction of the irradiating range of the ultraviolet light beam. At least a portion near a center of the irradiating range of the ultraviolet light beam of each line segment that forms a boundary of the ultraviolet light beam passing region in a width direction of the ultraviolet light beam passing region is substantially expressed by a quadratic curve that a distance r in the length direction of the irradiating range of the ultraviolet light beam on the basis of the center line is variable.