The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2002
Filed:
Dec. 04, 2000
Applicant:
Inventors:
John T. Welch, Albany, NY (US);
Kulbinder Kumar Banger, Albany, NY (US);
Seiichiro Higashiya, Albany, NY (US);
Silvana C. Ngo, Albany, NY (US);
Assignee:
Research Foundation of State University of New York, Albany, NY (US);
Primary Examiner:
Int. Cl.
CPC ...
C07F 7/02 ; C07F 1/08 ; C07F 1/10 ; C07F 1/506 ; C23C 1/600 ;
U.S. Cl.
CPC ...
C07F 7/02 ; C07F 1/08 ; C07F 1/10 ; C07F 1/506 ; C23C 1/600 ;
Abstract
Volatile metal complexes with &agr;-sila-&bgr;-diketonate ligands containing haloalkyl, and particularly, perfluoroalkyl, substitutents are useful as metal precursors for chemical vapor deposition processes and as nanostructured materials containing fluorous domains.