The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 22, 2002
Filed:
Feb. 21, 2001
Wei-Yang Su, Austin, TX (US);
Stephen Lee Sjoberg, Austin, TX (US);
Wheeler Conrad Crawford, Houston, TX (US);
Huntsman Petrochemical Corporation, Austin, TX (US);
Abstract
Provided herein are developer solutions useful in producing semiconductor-based circuit elements or precursors thereof, which contain tris-(2-hydroxyethyl)methylammonium hydroxide. Developers according to the invention are either aqueous or alcoholic solutions of tris-(2-hydroxyethyl)methylammonium hydroxide which preferably further comprise a stabilizer. Through use of the compositions provided herein, greatly reduced levels of volatile amines are released during the developing process which lessens the burden on clean room atmosphere purification equipment owing to lessened airborne impurities.