The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 15, 2002
Filed:
Mar. 21, 2000
Katsuya Shiga, Tokyo, JP;
Naofumi Murata, Tokyo, JP;
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Abstract
A test structure for insulation-film evaluation has a CCD structure comprising a semiconductor substrate ( ), a gate insulating film ( ) to be evaluated which is formed across the main surface of the semiconductor substrate ( ), a plurality of gate electrodes ( ) equally spaced in this order on the gate insulating film ( ), a wire ( ) connected to the gate electrodes ( ), a wire ( ) connected to the gate electrodes ( ), and a wire ( ) connected to the gate electrodes ( ). The test structure further comprises a read circuit ( ) including an inverter ( ) and other elements connected to the output stage of the CCD structure. This test structure allows simple failure location.