The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2002
Filed:
Oct. 25, 1999
Hisashi Nara, Hiratsuka, JP;
Kiyoharu Nakao, Isehara, JP;
Hakaru Mizoguchi, Hiratsuka, JP;
Toshihiro Nishisaka, Hiratsuka, JP;
Tatsuo Enami, Yokohama, JP;
Other;
Abstract
The invention provides an once through fan for an excimer laser apparatus having a reduced vibration and being capable of increasing a rotational speed. In order to obtain this, in an once through fan ( ) for an excimer laser apparatus provided with a blade portion ( ) having a plurality of blades, a rotary shaft ( ) for rotating the blade portion and a magnetic bearing ( ) rotatably supporting the rotary shaft in a non-contact manner so as to circulate a laser gas sealed within a chamber ( ) in accordance with a rotation of the blade portion, a rotor ( ) of a motor ( ) installed within the chamber ( ) and rotating the rotary shaft ( ) is mounted on an outer peripheral portion of the rotary shaft, and at least one magnetic bearing ( ) for supporting the rotary shaft is arranged in each of both sides in an axial direction of the rotor.