The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2002
Filed:
Jun. 22, 1999
Applicant:
Inventor:
Gen Nakamura, Utsunomiya, JP;
Assignee:
Canon Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03B 2/752 ; G03B 2/754 ; G03B 2/772 ;
U.S. Cl.
CPC ...
G03B 2/752 ; G03B 2/754 ; G03B 2/772 ;
Abstract
An exposure apparatus has a maintenance door for an exposure illumination lamp. The apparatus includes a detector for detecting temperature information of the lamp and for outputting the detected temperature information, a confirmation device for confirming a stop of an operation sequence of the exposure apparatus and for outputting a confirmation result and a controller for controlling a lock mechanism of the maintenance door on the basis of the temperature information and the confirmation result.