The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 08, 2002
Filed:
Feb. 05, 1998
Masami Aoki, Fishkill, NY (US);
Kabushiki Kaisha Toshiba, Kawasaki, JP;
Abstract
A semiconductor memory device includes a semiconductor substrate having convex and concave portions locally formed in a surface thereof. An anti-reflection film serves as a first mask member and is formed on the semiconductor substrate. A photoresist is formed on the anti-reflection film. The anti-reflection film is partially removed using an opening formed by patterning the photoresist so as to expose an upper surface of the convex portion. The convex portion is etched using the photoresist and the anti-reflection film left in the concave portion. The anti-reflection film and the photoresist are removed, thereby obtaining the semiconductor substrate worked in a self-alignment manner.