Air lock for introducing substrates to and/or removing them from a treatment chamber

Abstract

In an air lock for continuous introduction into and/or removal of workpieces from spaces ( ) separated atmospherically, the individual substrates ( ) are transported through a transfer channel ( ). At least one lock chamber ( ) serving to accommodate the substrates ( ) is arranged movably in the transfer channel ( ). During the substrate transport in the transfer channel ( ), the lock chamber ( ) is atmospherically separated both from the exterior ( ) having normal pressure and from the coating chamber ( ). The air lock ( ) includes a carrousel lock which has a carrousel housing ( ) and a lock chamber wheel ( ). On the periphery in the lock chamber wheel ( ) individual lock chambers ( ) are provided, in which the workpieces ( ) to be brought into the chamber to be loaded ( ) are inserted freely accessible on the normal pressure side. By turning the lock chamber wheel ( ), the substrates ( ) in the lock chambers ( ) are transported from the coating station [sic; loading station] (A) to the transfer station (B) into the treatment chamber ( ) diametrically opposite the normal pressure side. In the transfer station (B) the substrates ( ) are removed from the transfer channels ( ) by means of a transfer device ( ′) and are available for further treatment in the treatment chamber ( ).