The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2001
Filed:
Jan. 18, 2000
Toshiki Shimamura, Kanagawa, JP;
Kouji Inoue, Kanagawa, JP;
Sony Corporation, , JP;
Abstract
To manufacture a field-emitting type cathode of a planar display device at a high accuracy, the following steps are included: the step of forming a first electrode (,) on a substrate (,) and a an electron emitting portion (,) on the electrode (,), forming an insulating layer (,) on an area including the first electrode (,) and electron emitting portion (,), and forming an electrode layer (,) serving as a second electrode on the insulating layer (,); the step of forming a negative type photoresist layer (,) on the entire surface including the electrode layer (,), exposing the photoresist layer (,) by using the electron emitting portion (,) as a mask and thereby applying ultraviolet radiation (,) from the back of the substrate (,), and selectively removing a photoresist layer (,) at a portion corresponding to the electron emitting portion (,) by developing the layer (,); and the step of forming an opening from which the electron emitting portion (,) is exposed by using the remaining photoresist layer (,) as a mask and thereby selectively etching the electrode layer (,) and insulating layer (,).