The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 25, 2001
Filed:
Apr. 14, 2000
Applicant:
Inventors:
Thomas Gebele, Freigericht, DE;
Gert Rödling, Obertshausen, DE;
Assignee:
Leybold Systems GmbH, Hanau, DE;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B65G 1/300 ;
U.S. Cl.
CPC ...
B65G 1/300 ;
Abstract
A vacuum chamber for flat substrates features transport rollers for transport of the substrates. These transport rollers are held from the sides in bearings and are additionally braced between the bearings by at least one middle bearing. These middle bearings are each located on a plunger which is guided hermetically through an opening in the bottom of the vacuum chamber and is braced against a support underneath the bottom.