The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 18, 2001
Filed:
Apr. 05, 1999
Yutaka Nakamura, Kawasaki, JP;
Tetsuo Koezuka, Kawasaki, JP;
Hitoshi Komoriya, Kawasaki, JP;
Takao Hirahara, Kawasaki, JP;
Fujitsu Limited, Kawasaki, JP;
Abstract
An apparatus for assembling a semiconductor device including a stage having a substrate support surface for supporting a substrate, and a support member for carrying a semiconductor element to a position on or near the substrate supported by the stage. A microscope unit having a coaxial illuminating unit is arranged inclined to the substrate support surface of the stage, and a counter illuminating unit is arranged inclined on the opposite side from the microscope unit with respect to a normal to the substrate support surface of the stage. A camera is arranged at an image forming position of the microscope unit,and an image processing unit is connected to the camera. The substrate has a positioning mark, and the camera acquires an image of the positioning mark and an image of a reflection of the positioning mark reflected by the side surface of the semiconductor element.