The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Aug. 31, 1999
Naohisa Takayama, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A check surface of a reticle is divided into a plurality of frames, and an optical image obtained from the reticle in frame units is compared with a reference image to check a pattern. To attain this, the optical image is aligned with the reference image before a check. At this time, an optical image is obtained in each frame, and a reference image for use in checking each frame is generated. Then, the optical image is aligned with the reference image by referring to the offset amount in the vicinal frame in which the aligning process has been performed. Otherwise, an offset amount table storing each of a plurality of areas obtained by dividing the movement range of a stage on a reticle, and a corresponding offset amount when the stage is in the area are generated. The optical image is aligned with the reference image by referring to the offset amount table.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile