The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Mar. 09, 1998
Applicant:
Inventor:
Hajime Arai, Hyogo, JP;
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/9788 ;
U.S. Cl.
CPC ...
H01L 2/9788 ;
Abstract
A nonvolatile semiconductor memory device includes a silicon substrate, a floating gate electrode formed on silicon substrate with a silicon oxide film therebetween, a control gate electrode formed on a portion of floating gate electrode with an interlayer insulating film therebetween, and an erase electrode formed on another portion of floating gate electrode with an insulating film therebetween. The insulating film includes a silicon nitride film and a silicon oxide film.