The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Jun. 01, 1999
Applicant:
Inventors:
Ki-Hyun Hwang, Kyunggi-do, KR;
Seok-Woo Nam, Seoul, KR;
Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 2/176 ;
U.S. Cl.
CPC ...
H01L 2/176 ;
Abstract
A method of forming an isolation trench for an integrated circuit device includes forming a trench mask layer on a surface of a semiconductor substrate wherein a portion of the semiconductor substrate is exposed through the trench mask layer. An isolation trench is formed in the exposed portion of the semiconductor substrate, and a nitride liner is formed on surfaces of the isolation trench. A trench isolation layer is formed on the nitride liner wherein the trench isolation layer fills the trench, and the trench mask layer is damaged. The damaged trench mask layer is stripped so that the surface of the semiconductor substrate is exposed.