The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Jun. 30, 2000
Kuk Seung Yang, Seoul, KR;
Sang Tae Chung, Sungnam-shi, KR;
Hyundai Electronics Co., Ltd., Ichon, KR;
Abstract
There is disclosed a method of manufacturing a semiconductor device capable of preventing two electrodes from being short. The method comprises the step of forming a gate pattern in which a spacer is formed on a given region of a semiconductor substrate; forming a junction region on the semiconductor substrate by impurity ion injection process; forming a first insulating film on the entire structure, and then polishing the first insulating film until the upper portion of the gate pattern is exposed, to flatten it; removing the gate pattern to expose the semiconductor substrate, and then forming a gate oxide film on the exposed semiconductor substrate; etching a given region of the first insulating film to form a contact hole exposing the junction region; forming a barrier layer and a buffer layer on the entire structure; forming a conductive layer on the entire structure so that the portion in which a contact hole and a gate will be formed can be buried, and then polishing the conductive layer to form a gate electrode and a bit line and a plug of a charge storing electrode; and forming a second insulating film on the entire structure.