The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Jan. 19, 2000
Toby J. Winters, Austin, TX (US);
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Abstract
A downstream plasma reactor system incorporating a plasma-resistant blocking member is presented. In an embodiment, the system preferably includes a sealing member and a plasma-resistant blocking member. The sealing member may be arranged between a plasma tube and an inlet conduit configured to be in gaseous communication with a reaction chamber. The blocking member preferably extends from a discharge opening of the plasma tube into the inlet conduit to inhibit plasma exiting the discharge opening from passing the blocking member to contact the sealing member. Being so configured, the downstream plasma reactor system may have an improved mean time between failure of the seal between the plasma tube and the inlet chamber without compromising seal effectiveness.