The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 11, 2001
Filed:
Jan. 22, 1999
Seiko Epson Corporation, Tokyo, JP;
Abstract
A piezoelectric film element with structural characteristics such that cracks are not generated in the manufacturing of the piezoelectric film and a thicker piezoelectric film is possible without such cracks. The piezoelectric film element includes a dislocation layer, that is, a layer in which atoms in the crystals are partly defective, which is caused by lattice defects. In the process for forming the piezoelectric film, when a sol is turned into a gel by thermal treatment and when crystal grains of the sol grow, a lattice arrangement over the surfaces of the crystal grains is disturbed moderately. Accordingly, when the piezoelectric film is formed over the gel, the dislocation layer is formed in the piezoelectric film.