The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Dec. 04, 2001

Filed:

Sep. 01, 1998
Applicant:
Inventors:

Toshihisa Tomie, Tsukuba, JP;

Hideaki Shimizu, Tsuchiura, JP;

Hiroyuki Kondo, Tsukuba, JP;

Noriaki Kandaka, Tsukuba, JP;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
C01N 2/300 ; G21K 7/00 ;
U.S. Cl.
CPC ...
C01N 2/300 ; G21K 7/00 ;
Abstract

Photoelectron spectroscopy apparatus are disclosed that comprise a photoelectron detector and that exhibit improved performance of the photoelectron detector and thus more reliable and accurate analysis of photoelectron energy. In performing energy analysis of photoelectrons, the photoelectron detector measures the time distribution at which photoelectrons emitted from a specimen surface traverse a flight tube when the specimen is irradiated with X-rays from a pulse X-ray source. A magnetic field generator is situated near the specimen to collect and collimate photoelectrons emitted from the specimen surface and form a photoelectron flux inside a flight tube. Any one of a deflection electrode, electrostatic lens, magnetic field lens, or electromagnetic lens, or a combination thereof, is placed at the distal end of the flight tube in front of the photoelectron detector to disperse the photoelectron flux and increase the surface area in which the photoelectron flux is incident to the photoelectron-detection surface.


Find Patent Forward Citations

Loading…