The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2001
Filed:
Sep. 21, 1999
Applicant:
Inventors:
Chi-Shu Huang, Chungli, TW;
Chia-Lin Yeh, Tainan, TW;
Assignee:
Mosel Vitelic Inc., , TW;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H05B 3/04 ;
U.S. Cl.
CPC ...
H05B 3/04 ;
Abstract
A sleeve means is described. The sleeve means comprises a round plane and ring-shaped side adjacent to the round plane. The round plane has a central hole and six periphery holes thereon. The central hole and six peripheral holes respectively correspond to a central opening and six screw holes of a heater adapter flange used in Gasonics L3510 (trademark) etcher. The sleeve means could be jacketed onto the heater adapter flange for dispersing the stress on and reducing deformation of the heater adapter flange when the heater adapter flange is mounted on the chamber of the etcher.