The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2001
Filed:
May. 29, 1998
Applicant:
Inventors:
Henry G. Hughes, Scottsdale, AZ (US);
Marilyn J. Stuckey, Tempe, AZ (US);
Margaret L. Kniffin, Tempe, AZ (US);
Ping-chang Lue, Scottsdale, AZ (US);
Assignee:
Motorola, Inc., Schaumburg, US;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 2/120 ; H01L 2/150 ; G01N 2/740 ; G01N 3/300 ; B01D 7/102 ;
U.S. Cl.
CPC ...
H01L 2/120 ; H01L 2/150 ; G01N 2/740 ; G01N 3/300 ; B01D 7/102 ;
Abstract
A sensor (,) includes a cavity (,) formed by a substrate (,), an adhesive (,), and a filter (,). A sensing element (,) is located inside the cavity (,) while electrical contacts (,) coupled to the sensing element (,) are located outside the cavity (,). The filter (,) protects the sensing element (,) from physical damage and contamination during die singulation and other assembly processes. The filter (,) also improves the chemical sensitivity, selectivity, response times, and refresh times of the sensing element (,).