The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 04, 2001
Filed:
Nov. 04, 1999
Yosuke Miyoshi, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
A CVD apparatus is provided, which is capable of cleaning the inside of a reaction chamber without affecting a catalyzer member after a CVD process is completed. This apparatus is comprised of a reaction chamber; a substrate stage located in the chamber, a substrate being placed on the stage; a catalyzer holder located in the chamber for holding a catalyzer member; the holder having an inner space in which the catalyzer member is fixed; the holder having an opening that communicates with the inner space and that faces toward the substrate placed on the stage; a shutter located in the chamber for closing the opening of the holder; a cleaning device for cleaning an inside of the chamber after a CVD process is completed; and a gas supply line for supplying a source gas into the inner space of the holder. When a film is formed on the substrate, the source gas is supplied into the inner space of the holder to generate an active species due to a catalysis of the catalyzer member, and the active species is supplied to the substrate placed on the stage through the opening of the holder. When the inside of the chamber is cleaned by the cleaning device, the substrate is taken out of the chamber and the opening of the holder is closed by the shutter, separating the catalyzer member located in the holder from an outside atmosphere of the holder.