The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2001
Filed:
Dec. 14, 1999
Applicant:
Inventor:
John Lawrence Freeouf, Katonah, NY (US);
Assignee:
Interface Studies Corporation, Katonah, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01J 4/00 ;
U.S. Cl.
CPC ...
G01J 4/00 ;
Abstract
Improvements in accuracy and sensitivity in mechanical-optical metrology apparatus are achieved through the use of a value for angle of incidence that is an average of positive and negative values for different arrangements of the metrology apparatus. In the ellipsometry type of metrology the average value for angle of incidence is established by using one of a reversal of light beam direction, the providing of a separate light beam mounting arm and the mechanical rotation of the sample.