The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 27, 2001
Filed:
Oct. 13, 1999
Takashi Ide, Tokyo, JP;
Hiroshi Itoh, Tokyo, JP;
NEC Corporation, Tokyo, JP;
Abstract
An apparatus and a method for sample current spectroscopy surface measurement to inspect crystailnity of a sample surface. An electron beam is irradiated onto a surface of a sample by an electron gun. A variable voltage source supplies an acceleration voltage which is variable to change an acceleration energy of the electron beam irradiated from the electron gun onto the sample surface. A sample current measurement means measures a sample current which flows into a sample when the electron beam is irradiated from the electron gun onto the sample surface. Variation of the sample current is detected by measuring the sample current by the sample current measurement means when the acceleration energy of the electron beam irradiated by the electron gun onto the sample surface is changed by the variable voltage source, thereby crystallinity of the sample surface is inspected.