The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
May. 17, 2000
Shinsuke Hirano, Kanagawa, JP;
Tomohide Jozaki, Kanagawa, JP;
Sony Corporation, Tokyo, JP;
Abstract
The electrostatic chucking device,comprises an electrostatic chuck,a temperature detecting unit,for detecting the temperature of the electrostatic chuck,a power supply,connected to the electrostatic chuck,and used for impressing a DC voltage to the electrostatic chuck,to provide it with an attracting force; and a controller,for controlling the value of the DC voltage impressed by the power supply,according to the temperature of the electrostatic chuck detected by the temperature detecting unit,When the value of the temperature of the electrostatic chuck,detected by the temperature detecting unit,is higher than the preset value, the controller,lowers the voltage impressed by the power supply,from the preset value and when the value of the temperature of the electrostatic chuck,is lower than the preset value, the controller,raises the impressed voltage from the preset value, whereby the attracting force of the electrostatic chuck,can be kept irrespective of temperature change of the electrostatic chuck