The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
Apr. 27, 1999
Peter-Christian Eccardt, Ottobrunn, DE;
Kurt Niederer, Eggenfelden, DE;
Thomas Scheiter, Oberhaching, DE;
Martin Vossiek, München, DE;
Thomas Kölpin, Amberg, DE;
Siemens Aktiengesellschaft, Munich, DE;
Abstract
A spacer layer (,) with a cavity (,) etched out therein and a diaphragm (,) arranged thereabove on the spacer layer are located on a silicon substrate (,) with a doped region (,) formed therein, whereby the doped region and the diaphragm are electrically connected via terminal contacts (,) to electronic components (,) that are likewise integrated in the substrate (,). The electronic component are a component part of the operating circuit that can also be used for the drive of the diaphragm and for evaluating the diaphragm oscillations. The integration makes it possible to arrange the micromachined transducer components as array that can be electronically driven as phased array.