The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 20, 2001
Filed:
Mar. 16, 1995
Andrej Litwin, Stockholm, SE;
Shih-Hsin Ying, Plano, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
Lower reflow temperature in dielectrics is obtained by using a composite dielectric film. The composite dielectric film includes a first layer doped in the conventional range. A borophosphosilicate glass (BPSG) thick layer having concentrations of around 4.4 wt. % boron and around 5.6 wt. % phosphorus is exemplary. The composite dielectric film includes a second layer doped excessively. A BPSG thin layer having concentrations between 1-4 wt. % phosphorus and between 7-8 wt. % boron is exemplary. A capping layer of conventional dopant concentration may be additionally added to prevent outdiffusion. A composite dielectric BPSG film can be reflowed around 700° C. as compared to the typical 800-900° C. range. After reflow, etching away the second highly doped layer removes any potential adverse effects.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile